ACKNOWLEDMENT
M.I. and J.G. K. acknowledge support from the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy via the Excellence Cluster 3D Matter Made to Order (EXC-2082/1 – 390761711). The authors also thank Mrs. Heike Fornasier and Mrs. Birgit Hübner from Institute of Microstructure Technology, Karlsruhe Institute of Technology, for their assistance during the device fabrication. M. E. acknowledges that this work was partially conducted by the support from the H2020-MSCA-IF-2017, 786645—MMED project.
Data Availability Statement: Data available in article supplementary material.