ACKNOWLEDMENT
M.I. and J.G. K. acknowledge support from the Deutsche
Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s
Excellence Strategy via the Excellence Cluster 3D Matter Made to Order
(EXC-2082/1 – 390761711). The authors also thank Mrs. Heike Fornasier
and Mrs. Birgit Hübner from Institute of Microstructure Technology,
Karlsruhe Institute of Technology, for their assistance during the
device fabrication. M. E. acknowledges that this work was partially
conducted by the support from the H2020-MSCA-IF-2017, 786645—MMED
project.
Data Availability Statement: Data available in article
supplementary material.